University of Nebraska - Lincoln Selects SEMI-GAS Equipment for New Nanoscience Metrology Facility
Centurion™ gas cabinets and ancillary equipment supply gas to labs and clean rooms
Malvern, Pa. May 2012 –
The current contract includes the installation of numerous fully automatic Centurion gas cabinets, automatic switchover gas panels, wall mount systems and manual manifolds, as well as an exhaust scrubber and hazardous gas detection system for the facility.
Applied Energy Systems will support all of the SEMI-GAS equipment with an extensive installation and gas piping project, which includes installing high purity single wall and coaxial gas lines from the source systems to their designated points-of-use, including a reactive ion etch and krypton fluoride laser.
As the job approaches completion, Applied Energy Systems’ certified technicians will perform quality and safety checks, including analytical testing and line labeling. The final phase, in conjunction with the university, will require system validation, equipment commissioning and personnel training.
Funded in part by a grant from the National Institute of Standards and Technology, the university’s new 32,000 square foot center will provide a modern facility for nanofabrication, electron microscopy, scanning probe microscopy and other synthesis and characterization units. These labs require reliable delivery of ultra-high purity gases to complete and research various semiconductor processes such as wafer etching, photolithography and thin film deposition.
Applied Energy Systems president, Steve Buerkel, said, “Our high purity equipment delivers the quality gases needed to aid in the advancement of science and technology; we’re always excited to be a part of projects for research and lab facilities”.
For more information contact Megan Kasper at firstname.lastname@example.org or 610-647-8744.